ORTUS 700
Substrate holder: Dome ø620 mm, Planetary 3x ø250 mm. Automatic Optical Monitoring. 2xE-gun, Resistance evap., End hall assist, RF Plasma Assist Source.
ORTUS 700
The most compact PIAD coater provides all flexibility of ORTUS platform with options in technologycal devices, substrate holders, process control and accessories.
With dome diameter of 620 mm and possibility to install other substrate holders it is optimized for R&D and small scale production. For detailed information about our ORTUS IAD coater portfolio and its coating capabilities please download the
ORTUS CATALOGUE.
1. Substrate holder
| Size | Loading cap. of 1"for reff. | Thickness U% for all loading area | Max single substrate size | |
|---|---|---|---|---|
| Dome type | ø620 mm | 228 | ±1.5% | 220 mm |
| Planetary | 3 x ø250 mm | 132 | ±1% | 250 mm |
2. technological devices
- Electron Beam Evaporation (EBE)
- 3 different sizes EV M-6, EV M-8, EV M-10
- Customized crucibles, 1 ... 12 pockets
- Max. quantity : 2 pcs
- Cleaning and Assistance sources
- End-Hall ion source with Ion Current Density up to 1 mA/cm^2
- Accelerator with anode Layer (Ion Current Density up to 4.2 mA/cm^2)
- Copra: RF Plasma Assist Source (Ion Current Density up to 2.5 mA/cm^2)
- Max. quantity : 1 pcs
- Resistance evaporation source
- Max. quantity : 1 pcs together with 2 EBE
3. COATING PROCESS CONTROL
- Rate and thickness control system (quartz control)
- Optical process monitoring system OCP
- OCP Singlewave for monochromatic monitoring
4. ACCESSORIES
- Substrate heating system
- IR lamps
- Tubular heater