LIDIZ PLATFORM

The LIDIZ IBS coater line is the result and embodiment of 50 years’ experience in Ion Beam Sputtering (IBS) technology. IBS technology is well known for its extremely low-loss optical coatings. LIDIZ IBS Sputtering Systems represent state of the art tools for the deposition of optical coatings for a wide range of applications. LIDIZ has been designed to produce thin films from a wide range of materials with high accuracy and excellent quality.

Our unique self-developed optical process control system OCP Singlewave and OCP Broadband with real-time optimization of the optical coating process enables a tight control of complex filter coatings with high accuracy and repeatability.

Main Features:

• RF Grid high-power IBS for deposition with RF neutralizer to ensure high deposition rates and film quality
• RF IBS assist with RF neutralizer to ensure accurate control of the stoichometry and enables substrate pre-cleaning and activation
• Automatic Optical Monitoring system OCP in various configuration:
• OCP Broadband
• OCP Singlewave
• OCP Duo with 2 monitor types in one system
• OCP Laser
• Multiple choice of Substrate holders to provide maximum product flexibility and to match productivities needs:
• Single Disk
• Planetary system
• High speed single disk