ORTUS 1500
Substrate holder: Dome ø1390 mm, Planetary 4x ø590 mm. Automatic Optical Monitoring. 2xE-gun, 2xResistance evap., RF Plasma Assist Source.
ORTUS 1500
The biggest ORTUS with the highest loading capacity.
Distinguishing features:
- suitable for coating on large 3D shapes substrates
- suitable low temperature evaporation for coating on plastic substrates
For detailed information about our ORTUS PIAD coater portfolio and its coating capabilities please download the
ORTUS CATALOGUE.
1. Substrate holder
| Size | Loading cap. of 1"for reff. | Thickness U% for all loading area | Max single substrate size | |
|---|---|---|---|---|
| Dome type | ø1390 mm | 1075 | ±2% | 580 mm |
| Planetary | 4 x ø590 mm | 850 | ±1% | 590 mm |
2. technological devices
Electron Beam Evaporation (EBE)
- 3 different sizes EV M-6, EV M-8, EV M-10
- Customized crucibles, 1 ... 12 pockets
- Max. quantity : 2 pcs
Cleaning and Assistance sources
- Accelerator with anode Layer (Ion Current Density up to 4.2 mA/cm^2)
- Copra: RF Plasma Assist Source (Ion Current Density up to 2.5 mA/cm^2)
- Max. quantity : 1
Resistance evaporation source
- Max. quantity : 2 pcs together with 2 EBE
3. COATING PROCESS CONTROL
Rate and thickness control system (quartz control)
Optical process monitoring system OCP
- OCP Singlewave for monochromatic monitoring
4. ACCESSORIES
- Substrate heating system
- IR lamps
- Tubular heater