LIDIZ 1100
RF IBS for sputtering and assistance, Automatic Optical Monitoring, Increased Throughput
LIDIZ 1100
I-Photonics IBS coater LIDIZ 1100 is designed to produce the highest quality optical interference coatings with increased troughput.
For coating examples and detail information about LIDIZ please download the LIDIZ CATALOGUE.
With all advantages of IBS technology it is intended to be used in:
- Laser optics with low optical loss
- High power lasers
- Laser gyroscope
- Various AR/HR and filters for laser application
- Internet of things (IoT)
- Light Identification Detection and Ranging (LIDAR)
- Medical equipment and Measurement devices
- Beam splitters
- Band pass filters
- Edge filters
- Notch filters.
For coating examples and detail information about LIDIZ please download the LIDIZ CATALOGUE.
TECHNICAL DATA
| Installation area | 3490×2730×2460 mm (L×W×H) |
|---|---|
| Equipment weight | 5500 kg |
| Sputtering source | RF Grid IBS with RF neutralizer |
| Assistance source | RF Grid IBS with RF neutralizer |
| Substrate Holder | Single disk Ø440 mm (area 1520 cm2) |
| and coating area | Planetary 7x Ø 210 mm (area 2420 cm2) |
| Other planetary by request | |
| Coating uniformity | ≤±0.25% planetary 7x Ø 210 mm |
| ≤±0.5% for single disk Ø440 mm | |
| Process monitoring system | Automatic optical monitoring system OCP: |
| OCP Broadband, | |
| OCP Singlewave, | |
| OCP Duo (Broadband and Singlewave 2 in 1) | |
| Substrate materials | glass ceramics, chromatic and achromatic optical glass, quartz, potassium fluoride, sapphire, etc. |
| Number of targets, max. | 4 pcs |
| Sputtering targets | Ti, Ta, Nb, Zr, Hf, AI, Si, SiO2 etc. |
| Coating rate | Up to 4 Å /sec (material dependent ) |
| Substrate temperature in the process (without heater) | <100 оС |
| Substrate heating system temperature | <250 оС |
| Substrate heating uniformity | ± 2 оС |
| Ultimate pressure | 5E-5 Pa |
| Time to reach Ultimate pressure | 12 hours |
| Process start pressure | 8E-4 Pa |
| Time to reach process start pressure | 40 min |
| Pumping system | Dry mechanical pump & cryogenic pump |
| Turbo molecular pump (optional) |